Nanoscale mechanical property measurements using modified atomic force microscopy

被引：0
|
作者：
Kulkarni, Ashok V. [1 ]
Bhushan, B. [1 ]
机构：
[1] Ohio State Univ, Columbus, United States
来源：
Thin Solid Films | 1996年 / 290-291卷
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D O I：
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学科分类号：
摘要：
14
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页码：206 / 210
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