Recent progress in surface micromachined capacitive ultrasonic transducers

被引：0
|
作者：
Jin, X.C. [1 ]
Ladabaum, I. [1 ]
Degertekin, F.L. [1 ]
Calmes, S. [1 ]
Khuri-Yakub, B.T. [1 ]
机构：
[1] Stanford Univ, Stanford, United States
来源：
International Conference on Solid-State and Integrated Circuit Technology Proceedings | 1998年
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页码：880 / 883
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