A Study of Heat Transfer and Particle Motion Relative to the Modified Chemical Vapor Deposition Process

被引:0
|
作者
机构
[1] Choi, M.
[2] Greif, B.
[3] Baum, H.R.
来源
| 1600年 / American Society of Mechanical Engineers (ASME)卷 / 111期
基金
美国国家科学基金会;
关键词
Axial direction - Chemical vapor deposition process - Circumferential direction - Forced flows - Localised - Particle motions - Particle trajectories - Poiseuille flow - Rigid body rotation - Transfer motion;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] A Study of Heat Transfer and Particle Motion Relative to the Modified Chemical Vapor Deposition Process
    Choi, M.
    Greif, R.
    Baum, H. R.
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1989, 111 (1-4): : 1031 - 1037
  • [2] An experimental study of heat transfer and particle deposition for the modified chemical vapor deposition
    Cho, J
    Choi, M
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1995, 117 (04): : 1036 - 1041
  • [3] A study of flow, heat transfer and particle deposition during the modified chemical vapor deposition (MCVD) process
    Chang, CL
    Lin, YT
    JOURNAL OF MATERIALS PROCESSING & MANUFACTURING SCIENCE, 1995, 4 (01): : 3 - 16
  • [4] HEAT TRANSFER PROBLEM FOR THE MODIFIED CHEMICAL VAPOR DEPOSITION PROCESS.
    Choi, M.
    Baum, H.R.
    Greif, R.
    Journal of Heat Transfer, 1987, 109 (03): : 642 - 646
  • [5] THE HEAT-TRANSFER PROBLEM FOR THE MODIFIED CHEMICAL VAPOR-DEPOSITION PROCESS
    CHOI, M
    BAUM, HR
    GREIF, R
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1987, 109 (03): : 642 - 646
  • [6] An experimental study of heat transfer and particle deposition during the outside vapor deposition process
    Cho, J
    Kim, J
    Choi, M
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1998, 41 (02) : 435 - 445
  • [7] Simulation of particle transport and deposition in the modified chemical vapor deposition process
    Cheung, Catherine K. W.
    Fletcher, David F.
    Barton, Geoff W.
    McNamara, Pam
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2009, 355 (4-5) : 327 - 334
  • [8] Analysis of unsteady heat and mass transfer during the modified chemical vapor deposition process
    Park, K.S.
    Choi, M.
    Journal of Heat Transfer, 1998, 120 (04): : 858 - 864
  • [9] Analysis of unsteady heat and mass transfer during the modified chemical vapor deposition process
    Park, KS
    Choi, M
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1998, 120 (04): : 858 - 864
  • [10] CONJUGATE HEAT-TRANSFER AND PARTICLE DEPOSITION IN THE MODIFIED CHEMICAL-VAPOR-DEPOSITION PROCESS - EFFECTS OF TORCH SPEED AND SOLID LAYER
    PARK, KS
    CHOI, M
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1994, 37 (11) : 1593 - 1603