Development and applications of a compact electron cyclotron resonance source

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[1] O'Keeffe, Patrick
[2] Komuro, Shuji
[3] Den, Shoji
[4] Morikawa, Takitaro
[5] Aoyagi, Yoshinobu
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O'Keeffe, Patrick | 1600年 / 30期
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Semiconducting Gallium Arsenide;
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