Effect of nitrogen doping on the structure of cluster or microcrystalline silicon embedded in thin SiO2 films

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Department of Electronic Materials, School of Science and Engineering, Ishinomaki Senshu University, Minamisakai, Ishinomaki 986-8580, Japan [1 ]
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Thin Solid Films | / 1卷 / 275-279期
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Annealing - Chemical bonds - Crystal microstructure - Doping (additives) - Infrared spectroscopy - Nanostructured materials - Nitrogen - Raman spectroscopy - Silicon - Sputtering - Thin films;
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