PHASE TRANSFORMATION AND IMPURITY REDISTRIBUTION DURING PULSED LASER IRRADIATION OF AMORPHOUS SILICON LAYERS.

被引：0
|
作者：
Narayan, J. [1 ]
White, C.W. [1 ]
Holland, O.W. [1 ]
Aziz, M.J. [1 ]
机构：
[1] Solid State Divison, Oak Ridge National Laboratory, Oak Ridge, TN 37831, United States
来源：
| 1821年 / 56期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] PHASE-TRANSFORMATION AND IMPURITY REDISTRIBUTION DURING PULSED LASER IRRADIATION OF AMORPHOUS-SILICON LAYERS
    NARAYAN, J
    WHITE, CW
    HOLLAND, OW
    AZIZ, MJ
    JOURNAL OF APPLIED PHYSICS, 1984, 56 (06) : 1821 - 1830
  • [2] LIQUID-AMORPHOUS AND LIQUID-CRYSTALLINE PHASE-TRANSFORMATION AND IMPURITY SEGREGATION PHENOMENA IN SILICON DURING PULSED DYE-LASER IRRADIATION
    NARAYAN, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01): : 61 - 64
  • [3] IMPURITY REDISTRIBUTION DURING LASER IRRADIATION IN ION-IMPLANTED SILICON
    CAMPISANO, SU
    BAERI, P
    FOTI, G
    CIAVOLA, G
    RIMINI, E
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 48 (1-4): : 187 - 190
  • [4] PULSED LASER MELTING OF AMORPHOUS-SILICON LAYERS
    NARAYAN, J
    WHITE, CW
    APPLIED PHYSICS LETTERS, 1984, 44 (01) : 35 - 37
  • [5] MODELING OF PULSED LASER IRRADIATION OF THIN SILICON LAYERS
    GRIGOROPOULOS, CP
    PARK, HK
    XU, X
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 1993, 36 (04) : 919 - 924
  • [6] DETECTION OF CHARGED PARTICLES IN AMORPHOUS SILICON LAYERS.
    Kaplan, S.N.
    Morel, J.R.
    Mulera, T.A.
    Perez-Mendez, V.
    Schnurmacher, G.
    Street, R.A.
    IEEE Transactions on Nuclear Science, 1985, NS-33 (01):
  • [7] Redistribution of erbium during the crystallization of buried amorphous silicon layers
    O. V. Aleksandrov
    Yu. A. Nikolaev
    N. A. Sobolev
    V. I. Sakharov
    I. T. Serenkov
    Yu. A. Kudryavtsev
    Semiconductors, 1999, 33 : 606 - 609
  • [8] Redistribution of erbium during the crystallization of buried amorphous silicon layers
    Aleksandrov, OV
    Nikolaev, YA
    Sobolev, NA
    Sakharov, VI
    Serenkov, IT
    Kudryavtsev, YA
    SEMICONDUCTORS, 1999, 33 (06) : 606 - 609
  • [9] Computational model of pulsed-laser irradiation of hydrogenated amorphous silicon with phase changes
    Z Angew Math Mech ZAMM, suppl 5 (99):
  • [10] Phase Transformation Mechanism in Pulsed Excimer Laser Crystallization of Amorphous Silicon Thin Films
    Kuo, C-C.
    LASERS IN ENGINEERING, 2010, 19 (3-4) : 225 - 238
12345