Annealing effects of low pressure mercury and excimer laser light on degraded a-Si:H TFTs

被引：0
|
作者：
Lee, S.K. [1 ]
Oh, C.H. [1 ]
Kim, Y.S. [1 ]
Park, J.S. [1 ]
Choi, Y.I. [1 ]
Jang, J. [1 ]
Han, M.K. [1 ]
机构：
[1] Seoul Natl Univ, Seoul, Korea, Republic of
来源：
Journal of Non-Crystalline Solids | 1993年 / 164-66卷 / pt 2期
关键词：
6;
D O I：
10.1016/0022-3093(93)91109-G
中图分类号：
学科分类号：
摘要：
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页码：763 / 766
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