Micromachined field emission devices

被引：0

作者：

Cornell Univ, Ithaca, United States ^{[1
]}

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来源：

Microelectron Eng | / 1-4卷 / 523-526期

关键词：

Computer simulation - Electrodes - Electron guns - Electronic properties - Microelectromechanical devices - Micromachining - Monte Carlo methods - Optical properties - Resistors - Semiconducting silicon - Tungsten;

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摘要：

We present the application of micromachining technology to silicon-based field emission devices. Silicide formation on the emitter is shown to lead to lower voltage emission. Integration of series resistors and heaters is achieved by silicon bulk-micromachining. Multiple levels of tungsten electrodes are integrated by surface micromachining. This allows the integration of an entire micromachined electron gun array (MEGA) on a single silicon substrate. We review simulation results to illustrate the electron-optical properties of MEGA and show fabrication results and emission data.

引用

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