Raman studies of doped poly-Si thin films prepared by pulsed excimer laser annealing

被引：0
|
作者：
Compaan, A. [1 ]
Savage, M.E. [1 ]
Jayamaha, U. [1 ]
Azfar, T. [1 ]
Aydinli, A. [1 ]
机构：
[1] Univ of Toledo, Toledo, United States
来源：
Materials Science Forum | 1995年 / 173-174卷
关键词：
18;
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页码：197 / 202
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