Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe2* excimer lamp

被引：0
|
作者：
Universidade de Vigo, Galicia, Spain [1 ]
机构：
来源：
Appl Surf Sci | / 55-59期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
相关论文
共 50 条
  • [1] Photochemical vapour deposition of hydrogenated amorphous silicon-carbon thin films by using a Xe-2(*) excimer lamp
    Redondas, X
    Gonzalez, P
    Chiussi, S
    Parada, EG
    Pou, J
    Leon, B
    PerezAmor, M
    APPLIED SURFACE SCIENCE, 1996, 106 : 55 - 59
  • [2] Photochemical dissociation of organic silicon source using Xe2 excimer lamp in gas phase
    Horii, Naohiro
    Okimura, Kunio
    Inouye, Akihiro
    Shinku/Journal of the Vacuum Society of Japan, 2000, 43 (03) : 288 - 291
  • [3] Characteristics of thin film deposition by photo-CVD using a Xe2 excimer lamp
    Miyano, J
    Yokotani, A
    Kurosawa, K
    ELECTRICAL ENGINEERING IN JAPAN, 2004, 147 (04) : 43 - 50
  • [4] Rapid photochemical deposition of silicon dioxide films using an excimer lamp
    Bergonzo, Philippe
    Boyd, Ian W.
    Journal of Applied Physics, 1994, 76 (07):
  • [5] RAPID PHOTOCHEMICAL DEPOSITION OF SILICON DIOXIDE FILMS USING AN EXCIMER LAMP
    BERGONZO, P
    BOYD, IW
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) : 4372 - 4376
  • [6] ARF excimer laser and Xe2• excimer lamp induced photochemical fluorination of polyimide film
    Ikegame, T
    Murahara, M
    PLASMA DEPOSITION AND TREATMENT OF POLYMERS, 1999, 544 : 227 - 232
  • [7] AMORPHOUS HYDROGENATED SILICON-CARBON FROM VHF DEPOSITION
    ZEDLITZ, R
    LOTTER, E
    HEINTZE, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 166 : 1031 - 1034
  • [8] OPTOELECTRONIC PROPERTIES OF HYDROGENATED AMORPHOUS SILICON-CARBON AND NANOCRYSTALLINE-SILICON THIN FILMS
    Najafov, B. A.
    Dadashova, V. V.
    UKRAINIAN JOURNAL OF PHYSICS, 2013, 58 (10): : 968 - 973
  • [9] Laser annealing of hydrogenated amorphous silicon-carbon films
    Coscia, U
    Ambrosone, G
    Minarini, C
    Parisi, V
    Schutzmann, S
    Tebano, A
    Restello, S
    Rigato, V
    THIN SOLID FILMS, 2004, 453 : 7 - 12
  • [10] PLASMA DEPOSITED HYDROGENATED AMORPHOUS SILICON-CARBON FILMS
    GUARNIERI, CR
    LANDON, AJ
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 388 - 388
12345