Defect characterization in InP substrates implanted with 2 MeV Fe ions

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作者：
Frigeri, C. [1 ]
Carnera, A. [1 ]
Fraboni, B. [1 ]
Gasparotto, A. [1 ]
Cassa, A. [1 ]
Priolo, F. [1 ]
Camporese, A. [1 ]
Rossetto, G. [1 ]
机构：
[1] CNR-MASPEC Inst, Parma, Italy
来源：
Materials science & engineering. B, Solid-state materials for advanced technology | 1997年 / B44卷 / 1-3期
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页码：193 / 197
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