The determination of thermal annealing effect on a-Si:H films coated on glass and on single crystalline of silicon

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作者
Serin, Necmi [1 ]
Serin, Tülay [1 ]
Özdemir, Ali Riza [1 ]
Alkan, Bora [1 ]
Tarimci, Çelik [1 ]
Ünal, Basri [1 ]
机构
[1] Department of Engineering Physics, Science Faculty, Ankara University, 06100 Ankara, Turkey
来源
Turkish Journal of Physics | 2002年 / 26卷 / 01期
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摘要
19
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页码:53 / 59
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