IMPREGNATED-ELECTRODE-TYPE LIQUID METAL ION SOURCE.

被引：0
|
作者：
Ishikawa, J. [1 ]
Gotoh, Y. [1 ]
Tsuji, H. [1 ]
Takagi, T. [1 ]
机构：
[1] Kyoto Univ, Kyoto, Jpn, Kyoto Univ, Kyoto, Jpn
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B21卷 / 2-4期
关键词：
ION CURRENT - LIQUID METAL ION SOURCE - MICROFOCUSED ION BEAM;
D O I：
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摘要：
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页码：186 / 189
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