MMIC in-circuit and in-device testing with an on-wafer high frequency electric force microscope test system

被引：0
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作者：
Leyk, A. [1 ]
Van Waasen, S. [1 ]
Tegude, F.J. [1 ]
Kubalek, E. [1 ]
机构：
[1] Gerhard-Mercator-Universitaet, Duisburg, Duisburg, Germany
来源：
Microelectronics Reliability | 1997年 / 37卷 / 10-11期
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摘要：
10
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页码：1575 / 1578
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