A simple electrical method to determine the Si and oxide thicknesses in SOI materials

被引：0

作者：

Vu, Duy-Phach ^{[1
]}

Zavracky, Paul M. ^{[1
]}

Boden, Milton J. ^{[1
]}

Cheong, N.K. ^{[1
]}

机构：

[1] Kopin Corp, Taunton, MA, USA

来源：

Electron device letters | 1991年 / 12卷 / 08期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：427 / 429

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