Effect of substrate bias on microstructure and properties of tetrahedral amorphous carbon films

被引：0
|
作者：
Zhu, Jiaqi [1 ]
Han, Jiecai [1 ]
Meng, Songhe [1 ]
Li, Qiang [1 ]
Tan, Manlin [1 ]
机构：
[1] Ctr. of Composite Mat., Harbin Inst. of Technol., Harbin 150001, China
来源：
Journal of Materials Science and Technology | 2003年 / 19卷 / SUPPL.期
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摘要：
10
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页码：109 / 111
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