Dependence of optical and electrical properties of a-Si1-xCx:H films on thermal annealing

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作者：
Ohkubo, Tsutomu [1 ]
Motohashi, Mitsuya [1 ]
Homma, Kazuaki [1 ]
机构：
[1] Tokyo Denki Univ, Tokyo, Japan
来源：
Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi) | 1997年 / 80卷 / 03期
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页码：30 / 38
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