SURFACE STUDIES OF SEMICONDUCTOR PROCESS PIPE AND TUBE: 316L STAINLESS STEEL.

被引：0
|
作者：
Anewalt, Margaret K. [1 ]
Drummer, David M. [1 ]
de Pinillos, J.V.Martinez [1 ]
机构：
[1] Air Products & Chemicals Inc,, Surface Microscopy Lab, Allentown,, PA, USA, Air Products & Chemicals Inc, Surface Microscopy Lab, Allentown, PA, USA
来源：
Microcontamination | 1985年 / 3卷 / 04期
关键词：
PIPE; STEEL - Spectroscopic Analysis - STAINLESS STEEL - Surfaces - SURFACES - Microscopic Examination - TUBES - Spectroscopic Analysis;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The objective of this study is to characterize the surface of hydrogen bright annealed 316L stainless steel pipe and tube as received from the manufacturer and after treatment using chemical polishing and electropolishing techniques.
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页码：52 / 59
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