Fabrication of actuators using magnetostrictive thin films

被引：0
|
作者：
Honda, T. [1 ]
Arai, K.I. [1 ]
Yamaguchi, M. [1 ]
机构：
[1] Tokin Corp, Sendai, Japan
来源：
Proceedings of the IEEE Micro Electro Mechanical Systems | 1994年
关键词：
Actuators;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：51 / 56
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