Application of the pressure wave propagation method for adhesion defects detection in very thin multilayer structures

被引：0

作者：

Aïnouche, Leila ^{[1
]}

Alquié, Claude ^{[1
]}

机构：

[1] Lab. Instrum./Syst. d'Ile de France, Univ. Pierre et Marie Curie, 4 place Jussieu, 75252 Paris Cedex 05, France

来源：

Journal of Applied Physics | 2004年 / 96卷 / 03期

关键词：

Adhesion - Chemical bonds - Electric field effects - Ferroelectric thin films - Interfaces (materials) - Neodymium alloys - Pressure effects - Signaling - Spectrum analysis - Ultrasonic waves - Wave propagation;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The application of pressure wave propagation (PWP) method for adhesion defects detection in very thin multilayer structures was discussed. The test of trilayer structure and preliminary measurement of the acoustical and electrical properties was also described. By analyzing the signals assesses the correctness of the signal in the time domain, it was possible to determine at which interface the disbonds occurred. It was to be possible to detect and localize in trilayer structures, submicron gaps and a percentage of totally disbonded area as follows as 10% in the tested zones.

引用

页码：1475 / 1490

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