Nanostructure of near-surface Si layers formed by implantation and pulsed laser annealing

被引：0
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作者：
Klinger, D. [1 ]
Auleytner, J. [1 ]
Zymierska, D. [1 ]
Nowicki, L. [2 ]
机构：
[1] Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, PL-02-668 Warsaw, Poland
[2] Soltan Institute for Nuclear Studies, ul. Hoza 69, PL-00-681 Warsaw, Poland
来源：
Journal of Alloys and Compounds | 2004年 / 362卷 / 1-2期
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页码：282 / 286
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