DETERMINATION OF NITROGEN AND SILICON IN SILICON NITRIDE.

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Ichinose, Akio
Einaga, Hisahiko
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A precise but convenient method was developed for the determination of nitrogen and silicon in silicon nitride. As for nitrogen, sample was decomposed with sodium hydroxide at about 320 degree C and the resulting ammonia was collected in boric acid solution with an aid of steam vapor as a carrier. The collected solution was then titrated with a standard acid solution against methyl red and the nitrogen content was obtained. As for silicon, it was determined by a conventional gravimetric method.
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