Small-area inductor for silicon CMOS chips

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作者：
机构：
[1] Sugawara, Hirotaka
[2] Okada, Kenichi
[3] Masu, Kazuya
来源：
Sugawara, H. (sugawara@lsi.pi.titech.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 44期
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摘要：
CMOS integrated circuits - Eddy currents - Electromagnetism - Inductance - Magnetic flux - Magnetic leakage - Microelectromechanical devices - Semiconducting silicon
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