Design and development of a precise polishing equipment having control on the contact pressure

被引：0
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作者：
Shi, Xingkuan [1 ]
Yang, Jian [1 ]
Ren, Jingxing [1 ]
机构：
[1] Northwestern Polytechnical Univ, Xi'an, China
来源：
Guangxue Jishu/Optical Technique | 1999年 / 04期
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页码：68 / 69
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