Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings

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机构：
[1] Hu, Tengjiao
[2] Jones, Ronald L.
[3] Wu, Wen-Li
[4] Lin, Eric K.
[5] Lin, Qinghuang
[6] Keane, Denis
[7] Weigand, Steve
[8] Quintana, John
来源：
Wu, W.-L. (wen-li.wu@nist.gov) | 1983年 / American Institute of Physics Inc.卷 / 96期
关键词：
Number:; -; Acronym:; NRC; Sponsor: National Research Council; N66001-00-C-8083; DARPA; Sponsor: Defense Advanced Research Projects Agency;
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