MICROPROCESSOR-BASED ARCHITECTURE FOR E-BEAM WAFER TRANSFER SYSTEM.

被引：0

作者：

Landon, Thomas ^{[1
]}

Williams, M.C. ^{[1
]}

机构：

[1] IBM, Hopewell Junction, NY, USA, IBM, Hopewell Junction, NY, USA

来源：

IEEE transactions on components, hybrids, and manufacturing technology | 1986年 / CHMT-10卷 / 03期

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D O I：

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学科分类号：

摘要：

INTEGRATED CIRCUIT MANUFACTURE

引用

页码：397 / 400

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