Spectroscopy of DLC films deposited with a hydrogen-free technique

被引：0
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作者：
Gladyshev, I.V. [1 ]
Shishkin, V.I. [1 ]
Sigov, A.S. [1 ]
Svitov, V.I. [1 ]
机构：
[1] Moscow State Institute of Radioengineering Electronics and Automation, Vernadsky Av. 78, 117454 Moscow, Russia
来源：
Journal of Wide Bandgap Materials | 1997年 / 6卷 / 01期
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页码：11 / 16
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