Production of higher silanes in radio frequency SIH4 and H 2-SiH4 plasmas

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[1] Horvath, P.
[2] Rozsa, K.
[3] Gallagher, A.
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Horvath, P. (phorvath@jilau1.colorado.edu) | 1600年 / American Institute of Physics Inc.卷 / 96期
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Number:; DAD-18653-01; Acronym:; NREL; Sponsor: National Renewable Energy Laboratory;
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