Interference measurements for roughness of laser mirrors

被引：0
|
作者：
Zhang, Yaoning [1 ]
Cheng, Zuhai [1 ]
机构：
[1] Huazhong Univ of Science and, Technology, Wuhan, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 1999年 / 26卷 / 02期
关键词：
Interferometry - Mirrors - Roughness measurement;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A full-field, noncontacting interference measurement for roughness of laser mirrors has been developed. Suppose the probability density function of the surface height distribution is Gaussian. The relationship between the interference fringes contrast and the roughness of a mirror is deduced. Two laser mirrors with different roughnesses were measured. The data measured are in agreement with the results measured with a 6JA microscopic interference profilometer. The range of measurement is 0.01-0.12 μm and the accuracy of measurement is up to 0.002 μm theoretically. This work may be useful for the control of the process of mirror polishing.
引用
收藏
页码：141 / 144
相关论文
共 50 条
  • [1] Interference measurements for roughness of silicon mirrors with Twyman Interferometer
    Zhang, YN
    Zhang, XL
    Cheng, ZH
    AUTOMATED OPTICAL INSPECTION FOR INDUSTRY: THEORY, TECHNOLOGY, AND APPLICATIONS II, 1998, 3558 : 161 - 164
  • [2] Determination of the roughness of concave laser mirrors
    Asadchikov, VE
    Bukreeva, IN
    Vinogradov, AV
    Kozhevnikov, IV
    Ostashev, VI
    Sagitov, SI
    QUANTUM ELECTRONICS, 1997, 27 (09) : 824 - 829
  • [3] SURFACE-ROUGHNESS MEASUREMENTS OF LOW-SCATTER MIRRORS AND ROUGHNESS STANDARDS
    GUENTHER, KH
    WIERER, PG
    BENNETT, JM
    APPLIED OPTICS, 1984, 23 (21): : 3820 - 3836
  • [4] SURFACE ROUGHNESS MEASUREMENTS OF LOW-SCATTER MIRRORS AND ROUGHNESS STANDARDS.
    Guenther, Karl H.
    Wierer, Peter G.
    Bennett, Jean M.
    Applied Optics, 1983, 23 (21): : 3820 - 3836
  • [5] OPTICAL METHODS OF ROUGHNESS MEASUREMENTS - INTERFERENCE MICROSCOPY
    RATAJCZYK, E
    DOBOSZ, M
    MECHANIK MIESIECZNIK NAUKOWO-TECHNICZNY, 1983, 56 (07): : 425 - 428
  • [6] SURFACE-ROUGHNESS ASSESSMENT OF ULTRASMOOTH LASER MIRRORS AND SUBSTRATES
    GUENTHER, KH
    WIERER, PG
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 401 : 266 - 279
  • [7] ZNSE IN MULTILAYER FILMS FOR LASER MIRRORS AND INTERFERENCE FILTERS
    HEITMANN, W
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1965, 2 (05): : 280 - &
  • [8] INTERFERENCE MEASUREMENTS OF LASER BEAM
    KALESTYNSKI, A
    JANNSON, T
    PHYSICS LETTERS A, 1971, A 36 (06) : 467 - +
  • [9] NEAR-FIELD INTERFERENCE FRINGES FROM LASER MIRRORS
    RUDDER, CL
    PAOLANTONIO, A
    HAYLER, DA
    PROCEEDINGS OF THE IEEE, 1964, 52 (06) : 740 - +
  • [10] Interference microscope for sub-Angstrom surface roughness measurements
    Saxer, C
    Freischlad, K
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III, 2003, 5144 : 37 - 45
12345