Production of high-density plasmas in electron-beam-excited plasma device

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[1] Ito, Akihiro
[2] Miyano, Ryuichi
[3] Kitada, Ryouji
[4] Izumi, Shinya
[5] Ikezawa, Shunjiro
来源：
Ito, Akihiro | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
关键词：
Plasma sources;
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