Electron Microscopy Study on Amorphous Ge-Sb-Te Thin Film for Phase Change Optical Recording

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[1] Naito, Muneyuki
[2] Ishimaru, Manabu
[3] Hirotsu, Yoshihiko
[4] Takashima, Masaki
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Naito, M. | 1600年 / Japan Society of Applied Physics卷 / 42期
关键词：
Amorphous films - Crystal atomic structure - Crystalline materials - Electron diffraction - Optical recording - Sputtering - Ternary systems - Transmission electron microscopy;
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