FILM STRUCTURES AND PERPENDICULAR MAGNETIC ANISOTROPY OF Gd-Fe SPUTTERED FILMS.

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作者
Nawate, M. [1 ]
Kobe, H. [1 ]
Ohkoshi, M. [1 ]
Honda, S. [1 ]
Kusuda, T. [1 ]
机构
[1] Hiroshima Univ, Higashi-Hiroshima, Jpn, Hiroshima Univ, Higashi-Hiroshima, Jpn
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GADOLINIUM IRON ALLOYS - Sputtering - HEAT TREATMENT - Annealing - MAGNETIC MATERIALS - Thin Films - MICROSCOPIC EXAMINATION;
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摘要
The relation of film structure to magnetic anisotropy of Gd-Fe films sputtered with various bias voltages (V//B ) are reported. Films were sputtered under an Ar pressure of 10 mTorr at various bias voltages. Film structures for different V//B were determined using X-ray diffraction and scanning electron microscopy observations. Changes in film properties after annealing in air indicate that films formed with a high bias voltage are not easily oxidized. Structural changes occurred on 300 degree C annealing of films formed with a low V//B , but no such changes were observed for films sputtered with a high V//B .
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页码:688 / 690
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