Modification of tribological properties of silicon by boron ion implantation

被引：0
|
作者：
Gupta, B.K. [1 ]
Bhushan, Bharat [1 ]
Chevallier, Jacques [1 ]
机构：
[1] Ohio State Univ, Columbus, United States
来源：
S T L E Tribology Transactions | 1994年 / 37卷 / 03期
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23;
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页码：601 / 607
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