Monte Carlo simulation of hot-electron-induced dielectric breakdown in thin silicon dioxide films

被引：0
|
作者：
Kamakura, Yoshinari [1 ]
Ishida, Akihiro [1 ]
Taniguchi, Kenji [1 ]
机构：
[1] Dept. of Electronics and Info. Syst., Osaka Univ., 2-1 Yamada-oka, S., Osaka, Japan
来源：
Physica B: Condensed Matter | 1999年 / 272卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：532 / 534
相关论文
共 50 条
  • [1] Monte Carlo simulation of hot-electron-induced dielectric breakdown in thin silicon dioxide films
    Kamakura, Y
    Ishida, A
    Taniguchi, K
    PHYSICA B, 1999, 272 (1-4): : 532 - 534
  • [2] Hot hole induced breakdown of thin silicon dioxide films
    Tomita, T
    Utsunomiya, H
    Kamakura, Y
    Taniguchi, K
    APPLIED PHYSICS LETTERS, 1997, 71 (25) : 3664 - 3666
  • [3] Monte Carlo Simulation of Thin Silicon Dioxide Layer Evaporation
    Usenkov, Stanislav V.
    Mzhelskiy, Ivan V.
    Shwartz, Nataliya L.
    EDM: 2009 10TH INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES, 2009, : 66 - +
  • [4] Correlation of Dielectric Breakdown and Nanoscale Adhesion in Silicon Dioxide Thin Films
    Ranjan, A.
    O'Shea, S. J.
    Bosman, M.
    Molina, J.
    Raghavan, N.
    Pey, K. L.
    2020 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2020,
  • [5] Hot-electron-induced quasibreakdown of thin gate oxides
    Umeda, K
    Taniguchi, K
    JOURNAL OF APPLIED PHYSICS, 1997, 82 (01) : 297 - 302
  • [6] ACCELERATED DIELECTRIC BREAKDOWN OF SILICON DIOXIDE FILMS
    OSBURN, CM
    CHOU, NJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (10) : 1377 - 1384
  • [7] Silicon thin films thickness estimation: A Monte Carlo simulation study
    Babazadeh, Mohammad
    Movla, Hossein
    Jouneghani, Farzad Ghafari
    Salami, Davoud
    OPTIK, 2015, 126 (9-10): : 1040 - 1043
  • [8] Silicon dioxide breakdown induced by SHE (substrate hot electron) injection
    Umeda, K
    Tomita, T
    Taniguchi, K
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 1997, 80 (08): : 11 - 19
  • [9] Electron impact ionization and dielectric breakdown in the liquid noble gases: A Monte Carlo simulation
    Jones, HM
    Kunhardt, EE
    ICDL 1996 - 12TH INTERNATIONAL CONFERENCE ON CONDUCTION AND BREAKDOWN IN DIELECTRIC LIQUIDS, 1996, : 369 - 372
  • [10] HOT-ELECTRON-INDUCED PHOTON AND PHOTOCARRIER GENERATION IN SILICON MOSFETS
    TAM, S
    HU, CM
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (09) : 1264 - 1273
12345