Study of nanometer scale thickness testing method of film based on the white-light interferometry

被引：0
|
作者：
Yang, Yuxiao
Xiong, Kaili
Sun, Yan
Tan, Yushan
机构：
来源：
Guangzi Xuebao/Acta Photonica Sinica | 2003年 / 32卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Thickness measurement of transparent film by white-light interferometry
    Deng, Qinyuan
    Zhou, Yi
    Liu, Junbo
    Yao, Jingwei
    Hu, Song
    [J]. 8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS; AND SMART STRUCTURES AND MATERIALS, 2016, 9685
  • [2] Measuring small thickness changes of a thin film by white-light spectral interferometry
    Hlubina, P.
    Lunacek, J.
    Ciprian, D.
    Lunackova, M.
    [J]. OPTICAL SENSORS 2009, 2009, 7356
  • [3] FILM THICKNESS MONITOR BASED ON WHITE-LIGHT INTERFERENCE
    SANDERCOCK, JR
    [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1983, 16 (09): : 866 - 870
  • [4] Dispersive white-light interferometry for thin-film thickness profile measurement
    Ghim, YS
    Kim, SW
    [J]. Optical Measurement Systems for Industrial Inspection IV, Pts 1 and 2, 2005, 5856 : 419 - 426
  • [5] POSSIBILITIES AND LIMITATIONS OF THE FILM THICKNESS DETERMINATION METHOD BASED ON WHITE-LIGHT INTERFERENCE
    MUSILOVA, J
    OHLIDAL, I
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (09) : 1227 - 1238
  • [6] Simultaneous measurement of film surface topography and thickness variation using white-light interferometry
    Kitagawa, Katsuichi
    [J]. OPTOMECHATRONIC SENSORS, INSTRUMENTATION, AND COMPUTER-VISION SYSTEMS, 2006, 6375
  • [7] Dispersive white-light spectral interferometry used to measure thickness of a thin film on a substrate
    Hlubina, P.
    Ciprian, D.
    Lunacek, J.
    Lesnak, M.
    Chlebus, R.
    [J]. 15TH CZECH-POLISH-SLOVAK CONFERENCE ON WAVE AND QUANTUM ASPECTS OF CONTEMPORARY OPTICS, 2007, 6609
  • [8] FILM THICKNESS MEASUREMENT WITH WHITE-LIGHT FRINGES
    MOHANTY, PK
    PUNTAMBEKAR, PN
    SEN, D
    [J]. OPTICS AND LASER TECHNOLOGY, 1987, 19 (03): : 149 - 152
  • [9] Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry
    Dong, Jing-tao
    Lu, Rong-sheng
    [J]. APPLIED OPTICS, 2012, 51 (23) : 5668 - 5675
  • [10] Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry
    Ghim, Young-Sik
    You, Joonho
    Kim, Seung-Woo
    [J]. THIN-FILM COATINGS FOR OPTICAL APPLICATIONS IV, 2007, 6674
12345