High temperature deformation behaviour of ultra-high purity polycrystalline silicon

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Hirakawa, Yuichi [1 ]
Kawahara, Koichi [1 ]
Yoshida, Fuyuki [1 ]
Nakashima, Hideharu [1 ]
Abe, Hiroshi [1 ]
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[1] Dept. of Molec. and Mat. Sciences, Grad. School of Engineering Sciences, Kyushu University, Fukuoka 816-8580, Japan
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页码:1093 / 1096
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