Roughness evaluation of thermally oxidized Si(111) surfaces by scanning force microscopy

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[1] Suzuki, Mineharu
[2] Homma, Yoshikazu
[3] Kudoh, Yukie
[4] Abumoto, Norikuni
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Suzuki, Mineharu | 1600年 / 32期
关键词：
Roughness measurement;
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