Angle sensor with STM (1st report) - error analysis and pitch measurement with two STM tips

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MIT Lab. for Mfg. and Productivity, 77 Massachusetts Ave., MA 02139, United States ^{[1
]}

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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1996年 / 62卷 / 03期

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页码：403 / 407

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