LASER REPAIR TECHNOLOGY FOR HIGH-DENSITY PATTERN MASKS.

被引：0
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作者：
Miyauchi, Tateoki [1 ]
Hongo, Mikio [1 ]
Aiuchi, Susumu [1 ]
Mitani, Masao [1 ]
Kawanabe, Takao [1 ]
机构：
[1] Hitachi Ltd, Yokohama, Jpn, Hitachi Ltd, Yokohama, Jpn
来源：
| 1600年 / 20期
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摘要：
METAL CUTTING
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