Role of N2 and H2 as carrier gas on the selective area MOVPE of InP-based heterostructures using TBAs and TBP as group-V sources

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作者：
Zimmermann, G. [1 ]
Ougazzaden, A. [1 ]
Gloukhian, A. [1 ]
Rao, E.V.K. [1 ]
Delprat, D. [1 ]
Ramdane, A. [1 ]
Mircea, A. [1 ]
机构：
[1] France Telecom/CNET/PAB, Bagneux, France
来源：
Materials science & engineering. B, Solid-state materials for advanced technology | 1997年 / B44卷 / 1-3期
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页码：37 / 40
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