Using design software to minimize the environmental impact of tools and processes

被引：0
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作者：
Thurwachter, Sara
Francis, Terry
机构：
[1] Applied Materials, Santa Clara, CA, United States
[2] University of California, Berkeley, CA, United States
[3] University of Texas, Austin, TX, United States
[4] Oregon State University, Corvallis, OR, United States
来源：
MICRO | 2000年 / 18卷 / 07期
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页码：57 / 64
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