Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: Bi-stability and hysteresis

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作者：
Cunge, Gilles [1 ,2 ]
Crowley, Brendan [1 ]
Vender, David [1 ]
Turner, Miles M. [1 ]
机构：
[1] Plasma Research Laboratory, School of Physical Sciences, Dublin City University, Dublin 9, Ireland
[2] Lab. de Spectrométrie Phys., Université Joseph Fourier, Grenoble-1, 38402 Saint Martin d'Hères, France
来源：
Plasma Sources Science and Technology | 1999年 / 8卷 / 04期
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页码：576 / 586
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