Computer simulation for analysis of lattice polarity of wurtzite GaN{0001} film by coaxial impact collision ion scattering spectroscopy

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ULVAC JAPAN, Ltd., 2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan [1 ]
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Jpn J Appl Phys Part 2 Letter | / 11 A卷 / L1219-L1221期
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