Measurement of piezoelectric displacements of Pb(Zr, Ti)O3 thin films using a double-beam interferometer

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Dept. of Mat. Sci. and Engineering, North Carolina State University, Raleigh, NC 27695, United States [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 9 B卷 / 5402-5405期
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