Photoinduced deposition of aluminum thin film on silicon nitride and oxide

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作者：
机构：
[1] Ouchi, Hideki
[2] Ishida, Kenji
[3] Hanabusa, Mitsugu
[4] Shogen, Satoshi
[5] Kawasaki, Masahiro
来源：
Ouchi, Hideki | 1979年 / 31期
关键词：
Aluminum and Alloys;
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