Pb1-xCaxTiO3 thin films prepared by laser ablation of ceramic targets

被引:0
|
作者
Martin, M.J. [1 ]
Zaldo, C. [1 ]
Mendiola, J. [1 ]
机构
[1] Instituto de Ciencia de Materiales, de Madrid, Madrid, Spain
来源
Applied Surface Science | 1996年 / 96-98卷
关键词
Ceramic materials - Characterization - Crystal orientation - Deposition - Excimer lasers - Ferroelectricity - Laser ablation - Lead compounds - Optimization - Pulsed laser applications - Stoichiometry;
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摘要
Pb1-xCaxTiO3 thin films with thickness in the 200-1000 nm range have been prepared by pulsed laser deposition on Pt/TiO2/SiO2/(100)Si substrates. 10% weight PbO-rich ceramic targets have been ablated with a KrF excimer laser. It has been found that the Ca concentration of the films remains close to its concentration in the target (x = 0.24). Optimized crystalline orientation is obtained using non sintered targets, on the other hand optimized tetragonality has been found in 600 nm thick films. The films show an asymmetric ferroelectric behavior.
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页码:823 / 826
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