Ion beam assisted chemical etching of single crystal diamond chips

被引：0
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作者：
Kiyohara, S. [1 ]
Miyamoto, I. [1 ]
Kitazawa, K. [1 ]
Honda, S. [1 ]
机构：
[1] Science Univ of Tokyo, Chiba, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 121卷 / 1-4期
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摘要：
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页码：510 / 513
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