DEFLECTION ABERRATIONS OF MULTI-STAGE DEFLECTION SYSTEMS.

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作者：

Lencova, B.

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Optik (Jena) | 1981年 / 58卷 / 01期

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摘要：

Aberration coefficients of an electron-beam deflection system with several deflection stages can be expressed for given geometry and different excitation and rotation of individual stages with the help of the coefficients of individual stages and a set of auxiliary coefficients. The formulas for their evaluation are derived in the paper. Then the optimum geometry and set-up of an electron-beam scanning system can be found more easily.

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页码：25 / 35

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