Preparation of Cu-O films by electron cyclotron resonance plasma-assisted sputtering

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[1] Fujii, Takamichi
[2] Anno, Toshihiko
[3] Koyanagi, Tsuyoshi
[4] Hirai, Hidetoshi
[5] Matsubara, Kakuei
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Fujii, Takamichi | 1600年 / 30期
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Films;
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