Mass spectrometry of discharge products at 13.56 MHz in SF6 gas

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作者：
Nagaseki, Kazuya [1 ]
Kobayashi, Hidehiko [1 ]
Ishikawa, Itsuo [1 ]
Nishimura, Eiichi [1 ]
Saito, Yukinori [1 ]
Suganomata, Shinji [1 ]
机构：
[1] Yamanashi Univ, Kofu, Japan
来源：
| 1600年 / JJAP, Minato-ku, Japan卷 / 33期
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